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| Short specification: BA-1400 |
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Sputter Plants |
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| Hardware: |
1x |
Chamber (cylindrical, vertical arrangement) |
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2x |
Sputter cathodes |
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10 kW DC |
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1x |
Sputter cathode |
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20 kW DC |
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1x |
Substrate Heater (vertical arrangement) |
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1x |
Glowing Device |
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4500V, max. 400 mA |
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1x |
Thermal Evaporator |
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Boat Type , 6V, 6 kVA |
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1x |
Substrate Drive (Bottom Drive with Substrate |
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Holders) |
| Vakuum System: |
1x |
Fore Pump |
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Leybold Vane Pump SV 300 |
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1x |
Intermediate Pump |
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Balzers Root Pump WKP 2000 |
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2x |
High Vacuum Pumps |
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1x |
Balzers Cryo Pump RKP 630/800 |
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2x |
Vacuum Gauges |
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Pirani TTR90 (Leybold) |
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1x |
Vacuum Gauge |
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IMR265 (Pfeiffer) |
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1x |
Flow Controller |
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Bronkhorst 200 mln/min, 500 mln/min |
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1x |
Water Manifold incl. Valves and Sensors |
| Control System: |
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LayOp® |
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Software available: German or English |
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Service-phone |
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 0049 (0)6181-990536 |
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Online catalog |
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Currently NEW! |
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Visit our miscellaneous |
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online catalog vacuum |
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components. |
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more... |
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Newsletter |
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