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| Short specification: A 1100 Z 3 H/4 |
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Glass- Sputter plants |
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| Plant: |
1x |
Inlet chanber |
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1x |
Transfer chamber |
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12x |
Sputter stations |
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4x |
Transfer valves |
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4x |
Transport systems |
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2x |
Dry stations |
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1x |
glass washer station |
| Pump stand: |
3x |
Forepumps; S 630 F; pumping speed |
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630 m3 / h |
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1x |
Forepump; S 30 A; pumping speed |
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30 m3 / h |
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3x |
Blowers; WAU 2000; |
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2x |
Blowers; RA 5001 |
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20x |
Turbo pumps; TMP 1000 C; |
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2x |
Polycold PCT 500 |
| Sources: |
2x |
cathodes with power supply |
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SSV 60 (60 kw) |
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2x |
Sputter cathodes with power supply |
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30 (30 kw) 1 |
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1x |
HF sensor (5kw) f=13,56 MHz |
| Components: |
1x |
optical measure system "OPTOLEX" |
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NOTE: The plant was completely upgraded in 1996. |
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Price on demand! |
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Service-phone |
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 0049 (0)6181-990536 |
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Online catalog |
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Currently NEW! |
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Visit our miscellaneous |
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online catalog vacuum |
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components. |
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more... |
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Newsletter |
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